Electron-and ion-induced bending (EIB/IIB) phenomena have been studied in self-supported polycrystalline metallic and metal-amorphous bilayered nanocantilevers. The experiments reveal many interesting facts regarding electron/ion-matter interaction, which builds a proper foundation for the understanding of the phenomenon. The mechanism for bending of metallic cantilevers has been proposed to be primarily due to void-induced stress generation during ion beam irradiation. On the other hand, thermal effects have been found to play the dominant role in the case of bending of bilayer (amorphous-metal) nanocantilevers. The instantaneous, reversible, highly controllable and permanent nature of the process has been exploited to fabricate several complicated nanostructures in three dimensions. IIB of the fabricated cantilevers is shown to have a high precession mass sensing aptitude, capable of detecting a change in mass of the order of femtograms.
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