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Fabrication of magnetic artificial atoms

机译:磁性人造原子的制造

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摘要

We have fabricated gated vertical quantum dots made from a II-VI semiconductor heterostructure containing a paramagnetic quantum well. The absence of a known Schottky gate metal compatible with ZnSe based material precludes the traditional method of using a self-aligning shadow evaporated gate. Instead, we make use of a multi-step electron beam lithography process to surround a pillar with an insulating dielectric and gate. This process allows for the processing of dots with diameters down to 250nm. Preliminary transport data confirming the magnetic nature of the resulting artificial atom are presented.
机译:我们已经制造了由包含顺磁性量子阱的II-VI半导体异质结构制成的门控垂直量子点。缺少与ZnSe基材料兼容的已知肖特基栅金属,排除了使用自对准阴影蒸发栅的传统方法。取而代之的是,我们使用多步电子束光刻工艺,以绝缘电介质和栅极围绕柱子。此过程允许处理直径低至250nm的点。初步运输数据证实了所得人造原子的磁性。

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