Microstructure and optical properties of Al_(2)O_(3) prepared by oblique deposition using microsphere shell templates

摘要

We fabricated an orderly inclined Al_(2)O_(3) column array using a hollow microsphere template. The microstructure and optical properties were investigated with scanning electron micrography and a UV/VIS spectrometer, respectively. Microsphere shell templates were formed using atomic layer deposition to prevent the melting of polystyrene microspheres during the following high-temperature deposition process. An inclined Al_(2)O_(3) column array with a 30 deg tilt angle was grown by oblique deposition on a substrate with a 75.5 deg tilt angle with respect to the substrate normal. Birefringence and photonic crystalline behavior can be observed in the orderly inclined column array. The difference in the refractive indices between the p and s polarizations of the orderly inclined Al_(2)O_(3) column array was about 0.1. The photonic properties of the crystal were enhanced compared to those of substrates without patterns.