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Spectrally resolved phase-shifting interference microscopy: technique based on optical coherence tomography for profiling a transparent film on a patterned substrate

机译:光谱分辨相移干涉显微镜:基于光学相干断层扫描的技术,用于在图案化基材上对透明膜进行仿形

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摘要

Spectrally resolved white-light phase-shifting interference microscopy has been used for measurements of the thickness profile of a transparent thin-film layer deposited upon a patterned structure exhibiting steps and discontinuities. We describe a simple technique, using an approach based on spectrally resolved optical coherence tomography, that makes it possible to obtain directly a thickness profile along a line by inverse Fourier transformation of the complex spectral interference function.
机译:光谱分辨白光相移干涉显微镜已用于测量沉积在显示出台阶和不连续性的图案化结构上的透明薄膜层的厚度分布。我们使用基于光谱分辨光学相干断层扫描的方法描述了一种简单的技术,该方法可以通过复杂光谱干涉函数的逆傅立叶变换直接沿线获得厚度轮廓。

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