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Experimental demonstrations of the digital correction of complex wave errors caused by arbitrary phase-shift errors in phase-shifting interferometry

机译:实验证明相移干涉法中由任意相移误差引起的复杂波误差的数字校正

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摘要

In previous papers we proposed a digital method of correcting both amplitude and phase distortions caused by arbitrary phase-shift errors in standard four-frame phase-shifting interferometry (PSI), then extended it to the most generalized PSI, and showed the validity of this technique by computer simulations. Here some new simulations and a series of optical experiments with a plane wave, a spherical wave, and a piece of glass as objects are reported. The experimental results have further proved the correctness of our theoretical analysis and confirmed that our method is able to suppress double-frequency fringes in the retrieved amplitude map and the distortions in the phase map that are introduced by phase-shift errors such as to effectively eliminate the wave ripples and wall-like structures that are present in the unwrapped phase map owing to these errors. In addition, our technique can reduce the density of invalid pixels, which are barriers in phase unwrapping. Therefore the accuracy of both amplitude and phase measurements can be considerably improved.
机译:在先前的论文中,我们提出了一种数字方法,用于校正标准四帧相移干涉术(PSI)中由任意相移误差引起的幅度和相位失真,然后将其扩展到最通用的PSI,并证明了这种方法的有效性。计算机模拟技术。这里报道了一些新的模拟和一系列以平面波,球面波和一块玻璃作为对象的光学实验。实验结果进一步证明了我们理论分析的正确性,并证实了我们的方法能够抑制取回的振幅图中的双频条纹和由相移误差引起的相位图中的失真,从而有效地消除了误差。由于这些误差,存在于未包裹相位图中的波纹和壁状结构。另外,我们的技术可以减少无效像素的密度,这些像素是相位展开的障碍。因此,幅度和相位测量的精度都可以大大提高。

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