Two-wavelength phase-shifting interferometry with a superimposed grating displayed on an electrically addressed spatial light modulator

摘要

A two-wavelength moire phase-shifting interferometer that uses a superimposed grating has been developed. The optical phase shifts for the two wavelengths are given by digital phase shifts of a superimposed grating displayed on a liquid-crystal spatial light modulator. A phase shift of the moire fringe is achieved by equal phase shifts with opposite signs in the two gratings. A moire phase-shifting interferometer with no moving parts and no requirement for calibration of the value of the phase shifts was obtained. Our experimental result shows measurements of the profilc of a step object with a 2.65-μm synthetic wavelength.