X-ray Reflection Tomography: A New Tool for Surface Imaging

摘要

We report here a novel technique of surface imaging by X-ray reflection tomography utilizing an ordinary laboratory X-ray source. The technique utilizes the line projection, at different rotation angles, of the reflected beam from a highly reflecting patterned sample at grazing incidence. Filtered back-projection algorithm is applied to the line projection data to reconstruct an image of the pattern on the sample surface. Spatial resolution currently obtained is approx1.6 mm. Nonetheless, we have achieved high correlation between the original image and the reconstructed image. This work is the first step in future efforts of nondestructive X-ray imaging for buried surfaces and interfaces.