Chlorofluorocarbons (CFCs) long used as refrigerants in air conditioners and refrigerators have been found to contribute to the destruction of the earth's ozone layer. We decomposed CFCs by microwave-discharged thermal plasma under atmospheric pressure. The plasma consisted only of CFCs and steam, resulting in low gas emission and high electrical efficiency because no other gas such as Ar, He, LNG, or LPG is needed in this process to break down over 99.99percent of CFCs. Gas discharge after neutralization met United Nations Environment Programme (UNEP) guidelines and dioxin in the emitted gas was much less than the regulation set in Japan.
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