Fabrication and characterization of SOA/phase-modulator-integrated interferometer all-optical switch by selective area MOVPE

摘要

We fabricated InGaAsP/InP Mach-Zehnder and Michelson interferometer switch circuits monolithically integrating SOAs and phase shifters using a single-step selective-area MOVPE. Thanks to their simple fabrication procedure, we could achieve good reproducibility and high device yield. Their current and all-optical switching characteristics were evaluated and 20dB extinction ratio was achieved in all-optical switching. We also confirmed that integrated phase-shifter could calibrate the extinction ratio.