Light absorption inside the grooves of metallic gratings filled with a semiconductor material can be improved by means of the electric field enhancement. To this end, the influence of grating dimensions in the electric field spectral behavior is theoretically investigated. Two conditions of cavity resonance have been analyzed separately: (1) for TE polarization (electric field parallel to the grooves) and (2) for TM polarization (magnetic field parallel to the grooves). When dimensions are chosen according to the first condition, the enhancement of TE fields is found to increase with the height-to-width ratio, and it is accompanied with a decrease in the bandwidth. The same enhancement levels can be achieved for TM fields if the second condition holds, provided that the period-to-width ratio is large enough. The simultaneous enhancement of TE and TM fields, based on a condition of surface resonance excitation, can also be accomplished. In this case, the TM response is very sensitive to changes in groove depth and width.
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