Diffraction efficiency enhancement of femtosecond laser-engraved diffraction gratings due to CO2 laser polishing

摘要

This research demonstrates laser-assisted fabrication of high-efficiency diffraction gratings in fused-silica glass samples. Initially, femtosecond laser pulses are used to engrave diffraction gratings on the glass surfaces. Then, these micro-patterned glass samples undergo CO2 laser polishing process. unpolished diffraction gratings encoded in the glass samples show an overall diffraction efficiency of 18.1%. diffraction gratings imprinted on the glass samples and then polished four times by using a CO2 laser beam attain a diffraction efficiency of 32.7%. We also investigate the diffraction patterns of the diffraction gratings encoded on fused-silica glass surfaces. The proposed CO2 laser polishing technique shows great potential in patterning high-efficiency diffraction gratings on the surfaces of various transparent materials.