DEVELOPMENT OF A CLOSED-LOOP MICRO-/NANO-POSITIONING STAGE WITH SMALL TILTING ANGLES

摘要

This study is to develop a PC-based closed-loop micro-ano-positioning stage with small tilting angles. The developed system mainly consists of a piezoelectric actuator, a displacement magnification mechanism, a ball joint, a micro-ano-positioning stage body with four folded leaf springs, a fiber optic interferometer system, and a PC. After executing the optimization analyses of the stress, the displacement, and the frequency, using ANSYS software, the dimensions of the stage body have been designed and determined. A set of software, programmed using the LabView programming interface, was developed to conduct the PID control of the positioning system. According to the test results, the maximum tilting angles using the ball joint were about I arc-second within a travel of 35 gm. A positioning capability of 10 nm under a tracing speed of 5 nm/s of the developed closed-loop positioning stage, was possible based on the test results.