Studies of Thin Wear-Resistant Carbon Coatings and Structures Formed by Thermal Evaporation in a Vacuum on Piezoceramic Materials

摘要

Functional features of producing thin wear-resistant coatings have been studied by analyzing the conditions of their formation via thermal vacuum deposition on the surfaces of piezoceramic materials. The effect has been revealed of a low-energy ribbon flow on physical and operating characteristics of surfaces of piezoceramic elements, which operate in aggressive media. It has been found that the modification of surfaces of piezoelectric cells from the TsTC-19 ceramics by a low-energy ribbon flow (E ≤ 6 keV) improves the microgeometry of these surfaces, promotes the formation of carbon structures on them, which increases the surface microhardness by 8-12%.