Chemical modification of porous and corrugated silicon surfaces in polyacrylic acid solutions

摘要

The chemical modification of porous silicon(PS) surfaces makes it possible to eliminate weak silicon-hydrogen bonds and prevent the formation of Si-O and Si-OH groups deep in pores and on a corrugated silicon surface. Hence, the effect of PS aging is not observed during its storage in air, and the porous layer's composition is stable. Surfaces have been modified in polyacrylic acid solutions. The surface composition is analyzed on the basis of X-ray absorption spectra, and the morphology is investigated via scanning electron microscopy. It has been ascertained that the composition and morphology of a surface treated in polyacrylic acid solutions depend on the PS preparation method.