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Feedback control of vibrations in a micromachined cantilever beam with electrostatic actuators

机译:带静电执行器的微机械悬臂梁中振动的反馈控制

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摘要

The problem of feedback control of vibrations in a micromachined cantilever beam with nonlinear electrostatic actuators is considered. Various forms of nonlinear feedback controls depending on localized spatial averages of the beam velocity and displacement near the beam tip are derived by considering the time rate-of-change of the total energy of the beam. The physical implementation of the derived feedback controls is discussed briefly. The dynamic behaviour of the beam with the derived feedback controls is determined by computer simulation. [References: 8]
机译:考虑具有非线性静电致动器的微机械悬臂梁中振动的反馈控制问题。通过考虑光束总能量的时间变化率,可以得出取决于光束速度的局部空间平均值和光束尖端附近位移的各种形式的非线性反馈控制。简要讨论了导出的反馈控件的物理实现。通过计算机仿真确定具有导出的反馈控制的梁的动态行为。 [参考:8]

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