Vacuum Deposition of Parylene Films: Influence of Process Factors and Baffling on Film-Thickness Distribution

摘要

Deposition in vacuum of poly(paraxylene)-PPX or 'Parylene"-and derivative polymers from dimer that have been ionized and vaporized a process used for over 35 years to form protective and insulating coatings on electornic and other devices and to generate extremely thin, pinhile-free films.