Numerical simulation of a dual-source supersonic plasma jet expansion process: continuum approach

摘要

Expanding thermal plasma ( ETP) is a versatile technology for thin film deposition process with directional plasma flux and high deposition rates. This process involves expansion of supersonic plasma jets through a steep pressure ratio into a chamber maintained at near vacuum. Usually the plasma jets deviate from chemical and thermal equilibrium and the continuum approach is insufficient to describe the phenomena. In the current work, the continuum approach based Navier-Stokes equations have been implemented to study and understand the jet expansion process in a typical dual-arc plasma deposition reactor. The numerical predictions have been compared against in-house experimental data obtained by thermocouple measurements. For the range of back pressures ( 6-200 Pa) considered, it was observed that the jet core is supersonic and transitions to a subsonic zone downstream without the formation of any Mach disc for the prevalent operating parameters. Indications of thick and smeared barrel shocks were however observed in the computed flow-thermal fields. The modelled fluid was assumed to be a perfect gas with temperature dependent specific heats, thermal conductivity and viscosity coefficients, with constant Prandtl number of order unity. The radial spreads of the jets increase with increasing pressure ratio thus leading to enhanced interactions within reduced distances downstream of the nozzle exit. The jet core Mach number also increases, but moderately, with decreasing backpressure. It is concluded that within reasonable accuracy, continuum approach based calculations are able to capture most of the important phenomena involved in compressible, high-temperature, supersonic jet expansion processes which are essential in designing chambers relevant to the mentioned processes.