AN IMPROVED ENERGY-FILTERING MODEL FOR SCANNING ELECTRON MICROSCOPE TYPE 1 MAGNETIC CONTRAST INCORPORATING THE EFFECTS OF EXTERNAL ELECTRIC FIELDS

摘要

In this paper, an improved theoretical model for type 1 magnetic contrast calculations in the scanning electron microscope, incorporating the effects of external electric fields on the energy filtering of secondary electrons, is presented. The results showed that the ratio of the horizontal electric field to the vertical electric field determines the extent to which the contrast and quality factor can be improved. An increase in the contrast or quality factor can be achieved by increasing this electric field ratio in the region of the fringing magnetic field of the specimen. [References: 8]