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首页> 外文期刊>Journal of Microscopy >A numerical study of resolution and contrast in soft X-ray contact microscopy
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A numerical study of resolution and contrast in soft X-ray contact microscopy

机译:X射线接触显微镜分辨率和对比度的数值研究

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We consider the case of soft X-ray contact microscopy using a laser-produced plasma, We model the effects of sample and resist absorption and diffraction as well as the process of isotropic development of the photoresist, Our results indicate that the micrograph resolution depends heavily on the exposure and the sample-to-resist distance, In addition, the contrast of small features depends crucially on the development procedure to the point where information on such features may be destroyed by excessive development, These issues must be kept in mind when interpreting contact microradiographs of high resolution, low contrast objects such as biological structures. [References: 49]
机译:我们考虑了使用激光产生的等离子体进行软X射线接触显微镜的情况,我们对样品和抗蚀剂的吸收和衍射以及光致抗蚀剂的各向同性显影过程进行了建模,我们的结果表明显微照片的分辨率在很大程度上取决于此外,小特征的对比度在很大程度上取决于开发过程,以至于过度开发可能会破坏这些特征的信息,因此在解释时必须牢记这些问题。高分辨率,低对比度物体(如生物结构)的微型射线照相技术。 [参考:49]

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