UV-Curable SiO_2-TiO_2 Films for the Realization of Diffractive Optical Elements

摘要

Hybrid SiO_2-TiO_2 films are prepared starting from tetraisopropoxy titanate and 3-glycidoxipropyltrimethoxysilane, using the sol-gel process. During the sol synthesis titania clusters grow, conferring to the samples a photocatalytic activity. In this paper we exploit this property for the fabrication of surface-relief gratings. The realized structures are characterized by SEM, AFM and profilometric measurements, while the presence of titania clusters is confirmed by TEM analyses.