Influence of the N_2 Partial Pressure on the Characteristics of CrZrN Coatings Synthesized Using a Segment CrZr Target

摘要

In this study, CrZrN films were synthesized by unbalanced magnetron sputtering (UBM) under various N_2 partial pressures and their characteristics such as crystalline structure, surface morphology, microstructure and mechanical properties as a function of the N_2 partial pressures were analyzed by X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM), nanoindentation, wear tests, and corrosion tests. Results revealed that, with increasing the N_2 partial pressure from 0.05 to 0.21 Pa, the nitrogen content of the films increased from approximately 40.9 to 53.7 at%, the deposition rate decreased from approximately 100 to 59 nm/min and the surface roughness (Rms value) was increased from approximately 0.57 to 1.79 nm. The Cr_(37.3)-Zr_(9.0)-N_(53.7) film has the highest hardness, elastic modulus, and plastic deformation resistance of 36 GPa, 380 GPa, and 0.41, respectively. The Cr_(37.3)-Zr_(9.0)-N_(53.7) film also has the lowest friction coefficient and wear rate of 0.19 and 3.01 (10~(-6)m~3/Nm) at room temperature. In addition, the potentiodynamic test results showed the corrosion resistance of the CrZrN films became increased significantly and their corrosion current density (i_(corr)), corrosion potentials (E_(corr)) and corrosion rate decreased with increasing N_2 partial pressure.