High-Frequency Calibration of Piezoelectric Displacement Sensors Using Elastic Waves Induced by Light Pressure

摘要

In the study of ultrasound propagation in matter, displacement sensors are indispensable and of these, the most sensitive are piezoelectric sensors. In order to eliminate the intrinsic effects of the sensor from the measurements, the sensor has to be properly calibrated, which means that its transfer function has to be evaluated from a known sensor input signal and a measured sensor output signal. This has usually been done by comparing the sensor response signal to a known input signal, namely, an ultrasonic waveform, which can be theoretically calculated using mathematical models and numerical algorithms. Until now, the point-source-point-sensor model has been primarily used, while ultrasonic waves were induced mechanically either by a dropped ball or a capillary fracture. In this paper, a real-source-real-sensor model is presented. It provides a more faithful waveform construction and it enables the removal of the aperture effect from the calculated sensor transfer function, thus giving correct and universal sensor response characteristics. This was corroborated by high-frequency calibration measurements of the output signal of a Glaser-type conical sensor in two positions on both surfaces of a glass plate, while ultrasonic waves were induced by the radiation pressure of a nanosecond laser pulse.