Fabrication of double-sided YBa_2Cu_3O_(7-x) thin films by the off-axis pulsed-laser deposition

摘要

For the past few years, YBa2Cu307_.v (YBCO) thin films have attracted great attention for applications in microwave and millimetre wave devices such as delay lines [1], microstrip line resonators [2] and low-bandpass filters [3], It is well known that, in order to achieve highest quality factor Q and lowest loss at high frequencies, double-sided high-tempera-ture superconductor (HTS) thin films deposited on single-crystal substrates such as LaAlC>3 are essen-tial.