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Mechanism of nitridation at the melting temperature of silicon

机译:硅熔化温度下氮化的机理

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It has been well documented that the reaction rate during the nitridation of a silicon powder compact has typically two maxima, the first lying around 1200 °C and the second around the melting temperature of silicon (1410 °C), depending, for example, on impurities in the system [1-3]. The most likely mechanism to explain the onset of the first abrupt reaction maximum is the devitrification of the native silica on the powder surface and exposure of fresh silicon surfaces, thus initiating the nucleation and growth of S13N4. Here the devitrification means that the silica film is removed for example by being dissolved in an eutectic liquid formed with impurities such as Fe, Al [4,5] or by reduction, particularly in the presence of hydrogen [6], The explanations for the second reaction maximum has been considered to be that at higher temperature the diffusion flux becomes higher [2] or the vaporization of silicon increases [7]. The melting of silicon giving a faster rate of nitrogen diffusion [8] or creating space for reaction product [9] are also considered to the explanations. However, there are also some conflicts in the literature. The intention of this work is to study the nitridation mechanisms at the melting temperature of silicon.
机译:众所周知,硅粉末压块的氮化过程中的反应速率通常有两个最大值,第一个约为1200°C,第二个约为硅的熔化温度(1410°C),例如,取决于系统[1-3]中有杂质。解释第一个突然反应最大值开始的最可能机制是粉末表面的天然二氧化硅失透和新鲜硅表面的暴露,从而引发S13N4的成核和生长。在此,失透是指例如通过溶解在由诸如Fe,Al [4,5]之类的杂质形成的低共熔液体中或通过还原,特别是在氢[6]存在下的还原来除去二氧化硅膜。第二反应最大值被认为是在较高温度下扩散通量变得更高[2]或硅的蒸发增加[7]。对于硅的熔化,氮的扩散速度更快[8],或者为反应产物创造了空间[9]。但是,文献中也存在一些冲突。这项工作的目的是研究硅熔化温度下的氮化机理。

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