Probability of precision micro-machining of insulating Si_3N_4 ceramics by EDM

摘要

Electrical discharge machining (EDM) is used as a precision machining method for the electrically conductive hard materials with a soft electrode material. But recently we succeeded to machine on insulating material by EDM. The technology is named as an assisting electrode method. The EDMed surface is covered with the electrical conductive layer during discharge. The layer holds the electrical conductivity during discharge. For micro-EDM, the wear of tool electrode becomes lager ratio than the normal machining. So the micro-machining is extremely difficult to get the precision sample. In this paper to obtain a fine and precise ceramics sample, some trials were carried out considering the EDM conditions, tool electrodes material and assisting electrode materials. Insulating Si_3N_4 ceramics were used for workpiece. The machining properties were estimated by the removal rate and tool wear ratio. To confirm the change of micro-machining process, the discharge waveforms were observed. The micro-machining of the PHI 0.05 mm hole could be machined with the commercial sinking electrical discharge machine.