Active vibration isolation of a micro-manufacturing platform based on a neural network

摘要

A bionics mechanics-based structure model is constructed for the vibration isolation of a micro-manufacturing platform. The developed active vibration isolation system consists of a micro-manufacturing platform, strongly magnetostrictive actuators, air springs, a pedestal and a rubber layer. The actuators and air springs are arranged in parallel. A controller based on a three-layer neural network is applied to realize high performance in isolating complex micro-vibration. The absolute acceleration of the micro-manufacturing platform is used as the performance index of vibration control. The performance of the control system is tested by numerical simulation. The simulation results show that the active vibration isolation system has good isolation performance against floor disturbance and direct disturbance acting on the micro-manufacturing platform in all of the frequency range.