Table-top water-window soft X-ray microscope using a Z-pinching capillary discharge source

摘要

The development and demonstration of a table-top transmission soft X-ray (SXR) microscope, using a laboratory incoherent capillary discharge source has been carried out. This Z-pinching capillary discharge water-window SXR source, is a first of its kind to be used for high spatial resolution microscopy at λ = 2:88 nm (430 eV). A grazing incidence ellipsoidal condenser mirror is used for focusing of the SXR radiation at the sample plane. The Fresnel zone plate objective lens is used for imaging of the sample onto a back-illuminated (BI) CCD camera. The achieved half-pitch spatial resolution of the microscope approaches 100 nm, as demonstrated by the knife-edge test. Details about the source, and the construction of the microscope are presented and discussed. Additionally, the SXR images of various samples, proving applicability of such microscope for observation of objects in the nanoscale, are shown.