A Feasibility Study of Vibration-Assisted Nano-lmpact Machining by Loose Abrasives Using Atomic Force Microscope

摘要

Nanomachining of brittle materials is required in a wide range of applications. This pa per reports on the feasibility studies of vibration-assisted nano-impact machining by loose abrasives (VANILA), a novel nanomachining process for target-specific nanoma chining of hard and brittle materials. A mathematical model based on Hertzian fracture mechanics theory has been developed to evaluate the feasibility of material removal in the VANILA process, where hard abrasive grains impact the brittle workpiece surface. Experimental investigations are conducted using a commercially available atomic force microscope (AFM), to validate the feasibility of the proposed process. Several nanocav-ities with circular shape, having depths ranging from 6 to 64 nm and diameters ranging from 78 to 276 nm, are successfully machined. Patterns of nanocavities are machined to confirm the repeatability and controllability of the process. Observation of tool tips using a scanning electron microscope (SEM) reveals that the tool wear in the VANILA process is lesser than that observed in indentation process.