Atomic Motion and Diffusion Mechanism of Hydrogen in Amorphous Ceramics of the System Si-B-C-N

摘要

In this work we investigated the mobility of hydrogen in amorphous ceramics with the composition SiuB-CeoNn (AM26C). The material was derived from a pre-ceramic polymer and thermolyzed at 1000℃. After thermolysis the AM26C ceramics are assumed to be separated in an amorphous SiC phase and an amorphous C(BN)X phase. To measure the diffusivities we used deuterium as a tracer, which was introduced via isotope exchange from the gas phase at temperatures between 700℃ and 1100℃. Depth profiling was done with secondary ion mass spectrometry (SIMS). The profiles could be fitted with complementary error functions. The diffusivities obey an Arrhenius law. The activation enthalpy is 0.8 eV, the pre-exponential factor is 5x10~(-12) m~2 s~(-1). These values are close to those found for glassy carbon and thin amorphous C-B-N films as reported in the literature. We therefore conclude that the amorphous C(BN)X phase is the transport path for hydrogen in AM26C ceramics. A direct interstitial diffusion mechanism can account for the activation enthalpy of 0.8 eV. The low value for the pre-exponential factor is attributed to an entropy factor arising from the temperature dependence of the chemical potential of hydrogen.