Phase Identification and Growth Kinetics of the Intermetallic Compounds Formed during In-49Sn/Cu Soldering Reactions

摘要

For the application of In-49Sn solder in bonding recycled-sputtering targets to Cu back plates, the intermetallic compounds formed at the In-49Sn/Cu interface are investigated. Scanning electron microscopy (SEM) observations show that the interfacial intermetallics consist of a planar layer preceded by an elongated scalloped structures. Electron-probe microanalyzer analyses indicate that the chemical compositions of the planar layer and the scalloped structure are Cu_(74.8)In_(12.2)Sn_(13.0) and Cu_(56.2)In_(20.1)Sn_(23.7), respectively, which correspond to the #epsilon#-Cu_3(In,Sn) and #eta#-Cu_6(In,Sn)_5 phases. Kinetics analyses show that the growth of both intermetallic compounds is diffuson controlled. The activation energies for the growth of #eta#- and #epsilon#-intermetallics are calculated to be 28.9 kJ/mol and 186.1 kJ/mol. Furthermore, the formation mechanism of intermetallic compounds during the In-49Sn/Cu soldering reaction is clarified by marking the original interface with a Ta-thin film. Wetting tests are also performed, which reveal that the contact angles of liquid In-49Sn drops on Cu substrates decline to an equilibrium value of 25 deg C.