Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanical Systems (MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects owing to their small size and limited actuation force that can be generated. The creation of compliant structures that can be moved with applied electrostatic, thermal, and other forces means that they are also subject to surface forces such as adhesion and friction, which can be orders of magnitude larger than the applied actuation forces or body forces such as inertia or gravity. Extension of MEMS technology concepts to the nanoscale and development of Na-noElectroMechanical Systems (NEMS) will result in systems even more strongly influenced by surface forces.
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