Thermoreflectance measurements on test microelectronic devices at several probe wavelengths: Comparison between CCD and focused laser techniques

摘要

In this paper we present thermoreflectance measurements on polycrystalline silicon conducting tracks for several wavelengths of the probe beam. Two distinct experimental setup were employed, namely, the CCD camera setup and the focused laser setup. It is shown that the thermoreflectance signal behavior is closely related to the derivative of the optical reflectance with respect to the wavelength.