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Langmuir Probe Diagnostics for Medium Pressure and Magnetised Low-Temperature Plasma

机译:用于中压和磁化低温等离子体的Langmuir探针诊断

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In this contribution we aim at presenting the overview of the work that has been done in expanding the applicability of the probe method to low-temperature plasma at the pressure range when the collisions of charged particles with neutrals start to be important (we call this pressure range medium pressures) and to plasma under the influence of the weak-to-medium magnetic field that is commonly used in plasma enhanced technologies. Most of Ihe discussion is devoted to simple case of a plasma consisting of electrons and of one kind of positive ions. Our review also mostly concerns the cylindrical Langmuir probe. The first part of the article is devoted to discussion on the influence of the positive-ion-neutral collisions on the interpretation of the ion current part of the probe characteristic in order to get the true value of the plasma number density. In the second part one of the theories that take account of this effect is used to assess the influence of the weak magnetic field to the interpretation of the probe data. Finally we discuss the anisotropy of the electron velocity distribution function due to the effect of the magnetic field. The discussion is supported by the new experimental data.
机译:在这一贡献中,我们旨在概述已完成工作的概述,该工作是在带电粒子与中性粒子的碰撞开始变得重要时,将探针方法的适用性扩展到压力范围内的低温等离子体(我们称此压力为范围内的中等压力)和等离子在等离子增强技术中通常使用的弱到中等磁场的影响下。讨论的大部分致力于由电子和一种正离子组成的等离子体的简单情况。我们的评论还主要涉及圆柱形Langmuir探头。本文的第一部分专门讨论正离子-中性碰撞对探针特性的离子电流部分的解释的影响,以便获得等离子体数密度的真实值。在第二部分中,考虑到这种影响的一种理论被用来评估弱磁场对探针数据解释的影响。最后,我们讨论了由于磁场的影响,电子速度分布函数的各向异性。讨论得到了新的实验数据的支持。

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