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Preparation of superhard B_xC_y fibers by microvortex-flow hyperbaric laser chemical vapor deposition

机译:微涡流高压激光化学气相沉积法制备B_xC_y超硬纤维

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摘要

A novel class of freestanding B_2C_y fibers was prepared by hyperbaric-pressure laser chemical vapor deposition. Utilizing mixtures of diborane and helium with hydrocarbons, such as methane, ethene, and pentane, B_2C_y-alloy fibers were prepared at axial rates of up to 12.2 mu m/s. Regions of kinetically-limited and transport-limited growth were identified, and the activation energy for deposition from B_2H_6 + C_5H_(20) + He mixtures (at relative concentrations of 1:25:10) was found to be 197 + - 27 kJ/mol, while the rate constant was approximately 1810 mu m/s. Compositions ranged from B_(0.4)C_(0.6) to B_(0.03)C_(0.97) depending on the gas mixture and laser powers employed; axial and radial fiber compositions/microstructure were explored using Auger spectroscopy and electron microscopy. Glassy B_xC_y fibers with Vickers hardnesses of 42-45 GPa were grown at laser powers below 150 mW. The growth kinetics of pure boron fibers was also investigated from BCl_3 + H_2, BF_3 + H_2, and B_2H_6 + H_2 gas mixtures, producing fine-grained alpha-boron and large single-crystals of beta-boron. Micro-scale vortices in the gas flow emanating from the reaction zone were observed using particle image velocimetry; such vortices enhance axial fiber growth rates through rapid gas mixing. Arrays of fibers were also grown in-parallel using diffractive optical elements.
机译:通过高压激光化学气相沉积制备了一类新型的独立的B_2C_y纤维。利用乙硼烷和氦气与碳氢化合物(例如甲烷,乙烯和戊烷)的混合物,以高达12.2微米/秒的轴向速率制备了B_2C_y合金纤维。确定了动力学受限和运输受限的生长区域,发现从B_2H_6 + C_5H_(20)+ He混合物(相对浓度为1:25:10)沉积的活化能为197 +-27 kJ /摩尔常数,而速率常数约为1810微米/秒。组成范围从B_(0.4)C_(0.6)到B_(0.03)C_(0.97),具体取决于所使用的气体混合物和激光功率。使用俄歇光谱和电子显微镜研究了轴向和径向纤维的组成/微观结构。在低于150 mW的激光功率下生长维氏硬度为42-45 GPa的玻璃状B_xC_y纤维。还从BCl_3 + H_2,BF_3 + H_2和B_2H_6 + H_2气体混合物中研究了纯硼纤维的生长动力学,产生了细粒度的α-硼和大的β-硼单晶。使用颗粒图像测速仪观察到反应区产生的气流中的微小旋涡。这种涡流通过快速混合气体来提高轴向纤维的生长速率。纤维阵列也使用衍射光学元件平行生长。

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