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Thermal and optical properties of high purity CVD-diamond discs doped with boron and nitrogen

机译:掺硼和氮的高纯度CVD金刚石圆片的热和光学性能

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摘要

The effect of nitrogen and boron doping on the thermal and optical properties of high purity CVD-diamond grown by microwave plasma (MW-CVD) and DC arc-jet chemical vapor deposition (DCAJ-CVD) is investigated. Boron and nitrogen doping was carried out by adding to the process gas trimethylborate and nitrogen, respectively. Secondary ion mass spectrometry (SIMS) was used to quantify the incorporated boron concentration. To decide whether or not nitrogen is substitutionally incorporated electron paramagnetic resonance (EPR) measurements were applied. The influence of the impurities on the thermal properties was investigated by measuring the temperature dependence of the thermal conductivity between 77 and approximately 450 K. Using the Klemens-Callaway-Theory, information about phonon scattering at point and extended defects was obtained. In the case of nitrogen addition to the MW-CVD process, no enhanced point defect scattering but instead an increase of scattering at extended defects or grain boundaries was observed. The nitrogen doped DCAJ-CVD sample showed the typical yellow color and EPR signal of diamond containing substitutional nitrogen. The point defect concentration determined by the Klemens-Callaway-Theory was six times higher as compared to the MW-CVD samples. CVD-diamond samples doped with 2.5 × 10{sup}19 cm{sup}(-3) boron showed a bright blue color and absorption features indicating substitutionally incorporated boron. An enhanced phonon scattering due to point defects was not observed.
机译:研究了氮和硼掺杂对微波等离子体(MW-CVD)和直流电弧喷射化学气相沉积(DCAJ-CVD)生长的高纯度CVD金刚石的热学和光学性能的影响。通过分别向工艺气体中添加硼酸三甲酯和氮气来进行硼和氮掺杂。二次离子质谱(SIMS)用于量化掺入的硼浓度。为了确定氮是否被取代地结合,应用电子顺磁共振(EPR)测量。通过测量77到大约450 K之间的热导率对温度的依赖性,研究了杂质对热性能的影响。使用Klemens-Callaway理论,可以获得有关声子在点扩散和扩展缺陷的信息。在向MW-CVD工艺中添加氮的情况下,未观察到增强的点缺陷散射,而观察到了扩展缺陷或晶界处散射的增加。掺氮的DCAJ-CVD样品显示出含有替代氮的金刚石的典型黄色和EPR信号。由Klemens-Callaway理论确定的点缺陷浓度是MW-CVD样品的六倍。掺杂有2.5×10 {sup} 19 cm {sup}(-3)硼的CVD金刚石样品显示出亮蓝色,吸收特征表明硼被取代地结合。没有观察到由于点缺陷引起的声子散射增强。

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