Investigation of the initial growth of ultrananocrystalline diamond films by multiwavelength Raman spectroscopy

摘要

The initial growth phase of ultrananocrystalline diamond/amorphous carbon nanocomposite films (UNCD/a-C) has been investigated by scanning electron microscopy, atomic force microscopy and especially Raman spectroscopy. As due to resonance effects Raman spectra of carbon materials strongly depend on the excitation wavelength, a multiwavelength analysis has been performed with ranging from the UV region (325 nm) over the visible range (488 and 514 nm) to the IR region (785 nm). In addition, a set of measurements has been performed with a confocal Raman microscope, i.e. depth resolved, with a wavelength of 532 nm. The samples investigated were deposited with constant parameters, the deposition time being the only parameter varied, resulting in film thicknesses from 100 to 500 nm. It t