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Improved impermeability of PET substrates using oxygen and hydrogen plasma

机译:使用氧气和氢气等离子体改善PET基材的不渗透性

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摘要

A considerable decrease in permeability of polyethylene terephthalate (PET) films by means of surface plasma treatment in a reactive ion etching system is reported. The effects of oxygen and hydrogen radio frequency plasma on the surface properties of PET polymers are investigated by infrared spectroscopy, scanning electron microscopy (SEM), and X-ray photon spectroscopy (XPS). The surface morphology of the samples has been investigated using SEM and atomic force microscopy (AFM). The optical transmission spectroscopy has been studied further confirming the significant effect of O-plasma. Also the penetration of air through the treated substrates was investigated using a vacuum test. It is found that oxygen and hydrogen plasmas lead to about four-fold reduction in the penetration of air through the PET films, while the effect of hydrogen plasma has been more significant. In addition, oxygen plasma results in a rougher surface as observed both by AFM and SEM analyses. The formation of nanostructures on PET surfaces has been observed at plasma powers of 0.3 W/cm~2.
机译:据报道,在反应离子蚀刻系统中,通过表面等离子体处理,聚对苯二甲酸乙二醇酯(PET)薄膜的渗透性显着降低。通过红外光谱,扫描电子显微镜(SEM)和X射线光子光谱(XPS)研究了氧气和氢气射频等离子体对PET聚合物表面性能的影响。样品的表面形态已使用SEM和原子力显微镜(AFM)进行了研究。已经研究了光透射光谱法,进一步证实了O-等离子体的显著作用。还使用真空测试研究了空气通过处理过的基材的渗透。发现氧和氢等离子体导致空气通过PET膜的渗透减少约四倍,而氢等离子体的作用更为显着。此外,通过AFM和SEM分析,氧等离子体会导致表面更粗糙。在等离子功率为0.3 W / cm〜2的条件下,可以观察到PET表面纳米结构的形成。

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