DEVELOPMENT OF PRESSURE-TIME DEPENDENCE METHODS FOR THE CALIBRATION OF VACUUM GAUGES - A REVIEW

摘要

This paper presents an exhaustive review of trends in the development of methods for calibration of vacuum gauges in which pressure-time dependences are used. The author proposes and describes techniques for improving the calibration, the main objective of which is to extend the range of pressure measurements, to increase their accuracy and to raise the productivity of calibration (by reducing the time interval required to perform a test run). The data from some calculations are given. The experimental results obtained confirm the efficiency of the methods and facilities introduced into the practice of measurements in VNIIM, other scientific laboratories and plants of the Russian Federation. [References: 31]