Calibration of absolute pressure gauges in the range from 130 kPa to 0.1 Pa

摘要

The main characteristics of an ultrahigh vacuum system for absolute pressure calibration in the range from 130 kPa to 0.1 Pa are presented. Calibration can be performed either in dynamic or static equilibrium. The ultimate pressure is in theregion of 10-6 Pa, after exposing the system to atmospheric pressure without baking and after a few hours of pumping. The outgassing rate and pumpdown characteristics of the system following its exposure to atmospheric pressure are presented. The mainmetrological characteristics of the system as well as the optimum measuring uncertainty are given. A calibration of a Pirani gauge and a budget of the associated uncertainties are also presented.