Deposition of porous titanium oxide thin films as anode material for dye sensitized solar cells

摘要

Crystallized nanoporous TiO2 thin films were synthesized by combining reactive magnetron sputtering and Glancing Angle Deposition (GLAD). The growth temperature, the bias voltage and the rotation speed of the substrate were studied with the aim to grow nanoporous films presenting anatase constitution which are suitable for Dye Sensitive Solar Cells (DSSC) applications.