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首页> 外文期刊>Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology >Fabrication of columnar CsI and CsI:Na scintillation films deposited by vacuum thermal evaporation at high deposition rates
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Fabrication of columnar CsI and CsI:Na scintillation films deposited by vacuum thermal evaporation at high deposition rates

机译:通过高沉积速率的真空热蒸发沉积制备柱状CsI和CsI:Na闪烁膜

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摘要

Alkali halides have been increasingly used as scintillators and sensors in imaging and experimental particle physics applications. The luminescence efficiency of alkali halides is an important aspect of their application in imaging studies and related fields. Therefore, we investigate the optical, scintillation, and hygroscopic properties of cesium iodide (CsI) and sodium-doped CsI (Csl:Na) films grown via vacuum deposition at high deposition rates similar to 90 nm/s. The film deposited on a protective layer (such as: SiO2, Al, or parylene-N) exhibits the desired properties of having a columnar structure, high moisture resistance, and high luminescence. Our process quickly yields high-quality CsI and Csl:Na films with thicknesses greater than 100 gm that exhibit the desired columnar structure and luminescence effect. (C) 2015 Elsevier Ltd. All rights reserved.
机译:碱金属卤化物已越来越多地用作成像和实验粒子物理学应用中的闪烁体和传感器。碱金属卤化物的发光效率是其在成像研究和相关领域中应用的重要方面。因此,我们研究了通过真空沉积以接近90 nm / s的高沉积速率生长的碘化铯(CsI)和钠掺杂的CsI(Csl:Na)薄膜的光学,闪烁和吸湿性能。沉积在保护层上的膜(例如:SiO2,Al或聚对二甲苯-N)表现出具有柱状结构,高耐湿性和高发光性的所需特性。我们的工艺可快速生产出厚度大于100 gm的高质量CsI和Csl:Na薄膜,这些薄膜具有所需的柱状结构和发光效果。 (C)2015 Elsevier Ltd.保留所有权利。

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