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Non-Destructive and Non-Contact Determination of Layer Thickness and Thermal Properties of PVD and Sol-Gel Layers by Photothermal Methods

机译:用光热法无损和非接触式确定PVD和Sol-Gel层的厚度和热性能

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摘要

Thin layers in combination with metallic substrates are often used for moulding tools. The layer properties depend on the coating parameters and technology (e. g., sol-gel, PVD, CVD). This paper presents the pho-tothermal measurement of layer thickness and thermal properties of PVD and sol-gel layers which are needed for the development of moulding tools. The influence of optical parameters and surface roughness on the results is discussed.
机译:与金属基底结合的薄层通常用于模制工具。层的性质取决于涂层参数和技术(例如,溶胶-凝胶,PVD,CVD)。本文介绍了光热测量PVD和溶胶-凝胶层的厚度和热性能,这是开发成型工具所必需的。讨论了光学参数和表面粗糙度对结果的影响。

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