Development of the nano-probe system based on the laser-trapping technique

摘要

A nano-coordinate measuring machine (CMM) has been developed to achieve a measuring accuracy of 50 nm and a measuring volume of (10 mm){sup}3. To meet these stringent requirements, a laser-trapping probe is employed as a nano-sensing probe. This paper describes the development of the nano-CMM system with a laser-trapping probe and describes the performance of the probe via an assessment of the flatness and microsphere. It is observed that the laser-trapping probe can sense three-dimensional objects with a repeatability of 32 nm. Using the nano-CMM, the measurement uncertainty is estimated to be 335 nm (k = 2).