FLOW AND TEMPERATURE DEPENDENCE OF PARTICLE FORMATION IN AR-SILANE RF CAPACITIVELY COUPLED PLASMAS.

摘要

In this work we present an overview of our investigations on the particle formation in Silane plasma. We propose a generalized model, based on a simple balance equation, explaining the temperature and flow dependence of the agglomeration time of nano-clusters in Ar-SiH_(4) plasmas. This model allows easy incorporation of specific mechanisms and verification of their effect on particle growth.