INFLUENCE OF PROCESS PARAMETERS ON STRUCTURE OF CARBON COATINGS DEPOSITED AT ATMOSPHERIC PRESSURE

摘要

Carbon coatings were deposited on the stainless steel substrates from argon-acetylene gases mixture at atmospheric pressure by arc plasma jet chemical vapor deposition (CVD). It was obtained that the increase of the torch power leads to higher growth rate and increases surface roughness. The growth rates varied in the range of 4-750 nm/s depending on the syntheses conditions. Raman spectra indicated that the bonding structure in the coatings, obtained at 600 W torch powers, changes from the typical diamond-like/graphite-like carbon to the polymer-like carbon with the increase of the distance. The FTIR spectroscopy has shown that the absorption of coatings decreases with the increase of the wave range. The IR spectra showed clear evidence of C velence C and C velence O sp~(2) bonds and presence of sp~(3) CH_(2) symmetric (2850 cm~(-1)) and asymmetric (2920 cm~(-1)), and sp~(3) CH_(3) asymmetric (2960 cm~(-1)) modes in a-C:H coatings. It was obtained that the intensity of the sp~(2) C velence C and C velence O modes becomes more intense increasing the distance.