Methods for cleaning the inner surface of small-diameter pipes with glow discharge plasma prior to depositing coatings

摘要

The problem of cleaning the inner surfaces of tubular components has been one of the main tasks in various investigations and also in industry. The physical and chemical properties of the surfaces of materials (electron work function, emission of ions and electrons, adhesion of films to the substrate, corrosion resistance, etc.) are controlled by contamination of the surfaces with secondary impurities.