Current developments and challenges in laser patterning

摘要

Patterning in the micro and nano-scale is essential to many product innovations. They lead to mass-productive and cost-effective processes related to various research fields such as nanotechnology, biotechnology, information technology, and microanofluidic devices and systems. The ability to realize device miniaturization can be mainly attributed to the advances in precision engineering techniques, which are able to fabricate ever-smaller functional micro-anostructures in a cost-effective way.