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Interplay between parameter variation and oxide structure of a modified PAA process

机译:改进的PAA工艺的参数变化与氧化物结构之间的相互作用

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摘要

In the present work, the robustness of an anodizing process was tested. Important anodizing parameters such as the anodizing potential, the dwell time at the anodizing potential, and the bath temperature were varied. The influence of the parameter variation on the microstructure of the oxide layers was investigated by SEM. It could be shown that the pore diameter as well as the layer thickness reacts very sensitively on the alternating parameters. The barrier layer thickness clearly depends on the anodizing voltage but is independent on the dwell time.
机译:在本工作中,测试了阳极氧化工艺的鲁棒性。重要的阳极氧化参数,例如阳极氧化电势,在阳极氧化电势下的停留时间和浴温都发生了变化。通过SEM研究了参数变化对氧化物层微观结构的影响。可以看出,孔径和层厚对交替参数非常敏感地反应。阻挡层的厚度显然取决于阳极氧化电压,但与停留时间无关。

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