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Microstructure of amorphous diamond-like carbon thin films and changes during wear

机译:非晶态类金刚石碳薄膜的微观结构及磨损过程中的变化

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摘要

Using scanning and transmission electron microscopy, we investigate the microstructure of diamond-like carbon (DLQ thin films deposited in an electron-cyclotron resonance plasma. During pin-on-flat wear experiments, the amorphous DLC films are found to be a source for formation of transfer film and wear track debris with composite microstructure. The transfer film is observed to consist of an amorphous matrix with dispersed microcrystalline and tubular particles. The debris from the wear track represents separated bundles of aligned tubular particles and clusters of microcrystalline particles. The lowering of the coefficient of fiction measured during the wear experiments is related to the formation of the composite transfer film and its stable low value-to the possibility that the randomly oriented tubular particles from the transfer film engage in rolling friction in the process of their organization into aligned bundles. (c) 2005 Elsevier B.V. All rights reserved.
机译:使用扫描和透射电子显微镜,我们研究了类金刚石碳(沉积在电子回旋共振等离子体中的DLQ薄膜的微观结构。在销钉平面磨损实验中,发现无定形DLC膜是形成的来源)。观察到的转移膜是由分散了微晶和管状颗粒的无定形基体组成的,磨损膜上的碎片代表了成束的排列的管状颗粒和微晶颗粒簇。在磨损实验中测得的摩擦系数的变化与复合转移膜的形成及其稳定的低值有关,这种可能性是由于转移膜中无规取向的管状颗粒在组织过程中会发生滚动摩擦(c)2005 Elsevier BV保留所有权利。

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