Applied high-current N-ion-beam surface engineering of metals and industrial tools at Chiang Mai University

摘要

A 150-kY, high-current, non-mass-analyzed ion implanter based on a modified duoplasmatron ion source and a completely computerized control has been developed for industrially applicable ion beam surface engineering at Chiang Mai University. High-current ( ～mA) N-ion implantation in steels and alloys and other ion beam techniques such as single-ion-beam assisted deposition have been explored using the facility for modification of tribological properties. The ion implanter has been engaged in industrial service to local customers in implanting various practical objects. The ion implantation for both academic and applied purposes has proved to be successful in improving hardness and wear resistance as well as prolonging lifetime of the ion-beam-processed tools.